Known as a premier maker of PECVD and RIE Process Modules, Plasmatherm is condsidered by many to be the best-of-the-best for getting the job done.
Here is a system similar to that in use at manufacturing sites of GE Medical, Perkin Elmer, and many more sites. Unusually, this is a cluster tool for up to 500x500mm Square, and includes the following components:
PECVED Model PT 7000 Process Chambers 500x500mm
RIE Model PT 7000 Process Chambers 500x500mm
Cassette Load/Unload Module
Transfer Robot "Cluster" Hub.
Pumps, and so on ...